Microlithography/Molecular Imprinting
Description
1. J.D. Marty, M. Mauzac: Molecular Imprinting: State of the Art and Perspectives.- 2. H. Ito: Chemical Amplification Resists for Microlithography
Keywords
Technology & EngineeringTextiles & PolymersSciencePhysicsCondensed MatterChemistryPhysical & TheoreticalOrganic
2005Book
Author(s)Hiroshi Ito
PublisherSpringer Science & Business Media
ISBN9783540218623
LanguageEnglish
