Physical and Technical Problems of SOI Structures and Devices (NATO Science Partnership Sub-Series: 3:) | EKB DL

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Physical and Technical Problems of SOI Structures and Devices (NATO Science Partnership Sub-Series: 3:)

Description

In Physical and Technical Problems of SOI Structures and Devices, specialists in silicon-on-insulator technology from both East and West meet for the first time, giving the reader the chance to become acquainted with work from the former Soviet Union, hitherto only available in Russian and barely available to western scientists. Keynote lectures and state-of-the-art presentations give a wide-ranging panorama of the challenges posed by SOI materials and devices, material fabrication techniques, characterisation, device and circuit issues.