Plasma Processing of Semiconductors
Description
Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications.
Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
Keywords
Technology & EngineeringElectronicsElectricalManufacturingMaterials ScienceSciencePhysicsAtomic & MolecularTechnical & Manufacturing Industries & Trades
1997Book
Author(s)P.F. Williams
PublisherSpringer Science & Business Media
ISBN9780792345671
LanguageEnglish
