Introduction to VLSI Process Engineering

Circuit Design for CMOS VLSI

Integrated Circuits

Silicide Technology for Integrated Circuits

CMOS VLSI Engineering Silicon-on-Insulator (SOI)

Technology of Integrated Circuits

Fundamentals of Semiconductor Processing Technology

An Introduction to Surface-Micromachining

Three Dimensional System Integration IC Stacking Process and Design

TCAD for Si, SiGe and GaAs Integrated Circuits

Computer-Aided Design and VLSI Device Development (The Springer International Series in Engineering and Computer Science)

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