Silicide Technology for Integrated Circuits

Introduction to VLSI Process Engineering

Microelectronic Materials and Processes

Low Dielectric Constant Materials for IC Applications

Polycrystalline Silicon for Integrated Circuit Applications (The Springer International Series in Engineering and Computer Science, 45)

Crucial Issues in Semiconductor Materials and Processing Technologies

TCAD for Si, SiGe and GaAs Integrated Circuits

Polycrystalline Silicon for Integrated Circuits and Displays

Ion Implantation and Synthesis of Materials

Technology of Integrated Circuits

Materials for Information Technology Devices, Interconnects and Packaging

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