Reduced Thermal Processing for ULSI (Nato Science Series B:) | EKB DL

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Reduced Thermal Processing for ULSI (Nato Science Series B:)

Reduced Thermal Processing for ULSI (Nato Science Series B:)

Description

Addresses three broad but interrelated areas. The first is the subject of rapid thermal processing, a technology that minimizes processing time while relaxing the constraints on high temperature. The second area presents advances in equipment design and performance of rapid thermal processing equipm

Keywords

INTEGRATED CIRCUITS_VERY LARGE SCALE INTEGRATIONHEAT_TRANSMISSIONINTEGRATED CIRCUITS_ULTRA LARGE SCALE INTEGRATION

1990Book

Author(s)R.A. Levy

PublisherPlenum Publishing Corporation

ISBN9780306433825

LanguageEnglish

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