High-Resolution X-Ray Scattering from Thin Films and Multilayers
Description
This critical overview presents experimental methods for solving most frequent strucutral problems of mono-crystalline thin films and layered systems:
thickness, crystalline state, strain distribution, interface quality and other properties. A unified theoretical approach based on kinematical and dynamical scattering theories describes the experimental methods. This book is a ready-to-hand reference for experimentalists who want to improve their knowledge on modern x-ray methods for thin-film analysis.
thickness, crystalline state, strain distribution, interface quality and other properties. A unified theoretical approach based on kinematical and dynamical scattering theories describes the experimental methods. This book is a ready-to-hand reference for experimentalists who want to improve their knowledge on modern x-ray methods for thin-film analysis.
Keywords
Technology & EngineeringOpticsMaterials ScienceSciencePhysicsCrystallographyElectricalCondensed Matter
1998Book
Author(s)Václav Holý
PublisherSpringer Berlin Heidelberg
ISBN9783540620297
LanguageEnglish
