Low Dielectric Constant Materials for IC Applications
Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices Techniques, Fundamentals, and Devices
Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies
Nanostructured Films and Coatings
Microelectronic Materials and Processes
Silicide Technology for Integrated Circuits
Materials for Information Technology Devices, Interconnects and Packaging
MCM C/Mixed Technologies and Thick Film Sensors
Thin Film Device Applications
Ultra-thin Chip Technology and Applications
