Contamination Controls and Cleanrooms: Problems, Engineering Solutions, and Applications
Ultraclean Surface Processing of Silicon Wafers Secrets of VLSI Manufacturing
Fundamentals of Adhesion
Materials and Processes for Surface and Interface Engineering
Plasma Processing of Semiconductors
Synchrotron Radiation Research Advances in Surface and Interface Science : Issues and Technology
Experimental Innovations in Surface Science A Guide to Practical Laboratory Methods and Instruments
Plasma-Surface Interactions and Processing of Materials
Surface contamination: Genesis, detection, and control Volume 1
Solid Surface Physics (Springer Tracts in Modern Physics)