Laser Precision Microfabrication
Description
Miniaturization and high precision are rapidly becoming a requirement for many industrial processes and products. As a result, there is greater interest in the use of laser microfabrication technology to achieve these goals. This book composed of 16 chapters covers all the topics of laser precision processing from fundamental aspects to industrial applications to both inorganic and biological materials. It reviews the sate of the art of research and technological development in the area of laser processing.
Keywords
Technology & EngineeringLasers & PhotonicsNanotechnology & MEMSElectrical
2010Book
Author(s)Kōji Sugioka
PublisherSpringer Berlin Heidelberg
ISBN9783642105227
LanguageEnglish
