Laser-assisted microtechnology (Springer series in materials science)
Description
Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The monograph describes fundamental aspects and practical details of the technological processes as well as the optimum conditions for their realization.
Keywords
Electronic industries -- Technological innovations.Lasers -- Industrial applications.Manufacturing processes.Electronic circuit design.Thin film devices -- Design and construction.
