Micro and Nano Fabrication Tools and Processes
Description
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
Keywords
Technology & EngineeringNanotechnology & MEMSManufacturingTechnical & Manufacturing Industries & Trades
2015Book
Author(s)Hans H. Gatzen, Jürg Leuthold, Volker Saile
PublisherSpringer Berlin Heidelberg
ISBN9783662443941
LanguageEnglish
