The Physics of Micro/Nano-Fabrication
Description
In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.
Keywords
ScienceChemistryAnalyticPhysical & TheoreticalPhysicsCrystallographyAtomic & MolecularCondensed MatterSpectroscopy & Spectrum AnalysisTechnology & EngineeringElectricalElectronicsMicroelectronicsMaterials ScienceElectronic MaterialsThin Films, Surfaces & InterfacesOptics
1992Book
Author(s)Ivor Brodie
PublisherSpringer Science & Business Media
ISBN9780306441462
LanguageEnglish
