Modelling of Microfabrication Systems
Description
This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
Keywords
Technology & EngineeringNanotechnology & MEMSComputersComputer SimulationMathematicsNumber SystemsElectronicsManufacturingDesktop ApplicationsDesign & GraphicsNumerical Analysis
2003Book
Author(s)Raja Nassar
PublisherSpringer Science & Business Media
ISBN9783540002529
LanguageEnglish
