Low Dielectric Constant Materials for IC Applications | EKB DL

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Low Dielectric Constant Materials for IC Applications

Low Dielectric Constant Materials for IC Applications

Description

Low dielectric constant materials are an important component of microelectronic devices. This comprehensive book covers the latest low-dielectric-constant (low-k) materials technology, thin film materials characterization, integration and reliability for back-end interconnects and packaging applications in microelectronics. Highly informative contributions from leading academic and industrial laboratories provide comprehensive information about materials technologies for

Keywords

MedicalTechnology & EngineeringElectricalElectronicsCircuitsIntegratedMicroelectronicsMaterials ScienceElectronic Materials

2003Book

Author(s)P. S. Ho

PublisherSpringer Science & Business Media

ISBN9783540678199

LanguageEnglish

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